in situ polishing metrology

Accurate shape and roughness feedback guides grinding and polishing operations  for both small and large optics. Moving smaller optics between polishing centers and a metrology lab may not prove difficult. With large and very large optics, however, these trips can be time-consuming and extremely risky.

One answer is to install measurement equipment directly into polishing systems, which eliminates material handling and fixturing time. The challenge for in situ polishing metrology, however, is overcoming the air flow, vibration and noise associated with such equipment. The measurement systems must also be very compact, and robust enough to stand up to the vibration and debris in this challenging application.

Instantaneous measurement using 4D’s dynamic interferometers and optical profilers makes it possible to measure surface shape (PhaseCam) and surface roughness (NanoCam HD) despite vibration. Both systems have been incorporated directly into polishing equipment, providing immediate feedback for the polishing process on many of the world’s premier telescope and space optics projects.